2.45 GHz SAW-based passive binary transponder for wireless interfaces of integrated sensors

This paper describes the development of a MEMS tunable surface acoustic wave (SAW) device that allows an integrated sensor to be interrogated wirelessly in a range of several meters. The component itself requires no power for the wireless communication, as the principle is based on evaluating the reflected signal similar to a radar echo. The structure is similar to a one port reflective SAW delay line device. A MEMS switch is used to modulate the SAW according to the binary sensor output. The encoding solely requires an electrostatic tuning voltage of as low as 3 V for the MEMS switch. We successfully demonstrated that the device assembled on a microstrip antenna wirelessly transmitted ASCII characters over a distance of up to 2 m.