Improved Ferroelectric Properties of (111)-Oriented PbZr0.52Ti0.48O3 Thin Films on SrRuO3/Pt Hybrid Electrodes

(111) oriented PbZr0.52Ti0.48O3 thin films were epitaxially grown on SrRuO3 and SrRuO3/Pt electrode coated Al2O3(0001) substrates by pulsed-laser deposition, respectively. The X-ray diffraction analysis revealed that PZT films on SrRuO3/Pt electrode had better crystal quality than the films on SrRuO3 electrode. Compared to the SrRuO3 electrode, the SrRuO3/Pt hybrid electrode could significantly improve ferroelectric properties of PbZr0.52Ti0.48O3 films with 1 times larger remnant polarization (2Pr = 40.1 C/cm2), 0.4 times smaller coercive field (2Ec = 40 kV/cm), better fatigue endurance (8.8% degradation at 1011 switching cycles) and lower leakage current density (10-8 A/cm2 at an applied voltage of 5 V). The reliable ferroelectric properties in PbZr0.52Ti0.48O3 films with SrRuO3/Pt hybrid electrode indicate that the combination of the excellent fatigue behavior using SrRuO3 electrodes with the low leakage currents with Pt electrodes can be suitable for the application of integrated ferroelectric devices.