Characteristics of RF cold plasma at atmospheric pressure

被引:0
|
作者
Qiu, Lang [1 ]
Meng, Yuedong [1 ]
Shu, Xingsheng [1 ]
机构
[1] Chinese Acad Sci, Inst Plasma Phys, Hefei 230031, Peoples R China
来源
PLASMA SCIENCE & TECHNOLOGY | 2007年 / 9卷 / 02期
关键词
radio frequency; atmospheric pressure; alpha mode; gamma mode; hollow cathode; dielectric barrier;
D O I
暂无
中图分类号
O35 [流体力学]; O53 [等离子体物理学];
学科分类号
070204 ; 080103 ; 080704 ;
摘要
The characteristics of a stable discharge at atmospheric pressure is investigated. The plasma source consisted of two closely spaced parallel-plated perforated electrodes, driven by a radio frequency power to generate a uniform cold plasma in Helium at atmospheric pressure. Both alpha and gamma modes were clearly observed. The hollow cathode effects were found in the discharge. The influence of the dielectric barrier on the discharge was also investigated by utilizing a surface-anodized aluminium electrode as the anode.
引用
收藏
页码:165 / 168
页数:4
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