Femtosecond-laser-induced modifications on the surface of a single-crystalline diamond

被引：3

作者：

Okada, Tatsuya ^{[1
]}

Tomita, Takuro ^{[1
]}

Ueki, Tomoyuki ^{[1
]}

Masai, Yuki ^{[2
]}

Bando, Yota ^{[2
]}

Tanaka, Yasuhiro ^{[3
]}

机构：

[1] Tokushima Univ, Div Sci & Technol, Tokushima 7708506, Japan

[2] Tokushima Univ, Grad Sch Adv Technol & Sci, Tokushima 7708506, Japan

[3] Kagawa Univ, Fac Engn, Dept Adv Mat Sci, Takamatsu, Kagawa 7610396, Japan

来源：

JAPANESE JOURNAL OF APPLIED PHYSICS | 2017年 / 56卷 / 11期

关键词：

HIGH-VOLTAGE;

D O I：

10.7567/JJAP.56.112701

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

We investigated femtosecond-laser-induced modifications on the surface of a single-crystalline diamond and the changes that occur in them with annealing by observing the cross sections of laser-irradiated lines by transmission electron microscopy (TEM). Femtosecond laser pulses were irradiated on the (001) surface of a diamond by scanning along straight lines. An aluminum film was deposited on the (001) surface after the irradiation, and a TEM sample was prepared. Element mapping and electron diffraction analyses showed that the laser-modified regions were composed of single-crystalline diamond, graphite, and amorphous carbon. The existence of aluminum in the laser-modified regions suggested that the regions were porous when laser-irradiated. After the bulk sample was annealed, another cross-sectional TEM sample was prepared. The annealing induced the diffusion of aluminum from the film into the laser-modified regions where the extension of amorphous areas was observed. (c) 2017 The Japan Society of Applied Physics

引用

页数：5

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