Whole field surface roughness measurement by laser speckle correlation technique

被引：49

作者：

Toh, SL ^{[1
]}

Quan, C ^{[1
]}

Woo, KC ^{[1
]}

Tay, CJ ^{[1
]}

Shang, HM ^{[1
]}

机构：

[1] Natl Univ Singapore, Dept Mech Engn, Singapore 119260, Singapore

来源：

OPTICS AND LASER TECHNOLOGY | 2001年 / 33卷 / 06期

关键词：

surface roughness; laser speckle correlation; ASC;

D O I：

10.1016/S0030-3992(01)00054-8

中图分类号：

O43 [光学];

学科分类号：

070207 ; 0803 ;

摘要：

This paper describes a speckle correlation technique for the determination of surface roughness, ranging from 1.6 to 50 mum. Instead of moving the laser beam, the specimen is rotated to achieve angular speckle correlation (ASC) in the far-field plane. The technique is simple and requires minimum optical alignment. The experimental results show a good agreement with the standard specimen of known roughness. An error analysis on the experiment has been carried out. Together with the theoretical curves, the roughness values can be easily related to the change of incidence angle at a particular visibility of the correlation fringes between two speckle patterns. (C) 2001 Elsevier Science Ltd. All rights reserved.

引用

页码：427 / 434

页数：8

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