ZnO thin film as methane sensor

被引：0

作者：

Mitra, P. ^{[1
]}

Mukhopadhyay, A. K. ^{[2
]}

机构：

[1] Univ Burdwan, Dept Phys, Burdwan 713104, W Bengal, India

[2] Cent Glass & Ceram Res Inst, Kolkata 700032, India

来源：

BULLETIN OF THE POLISH ACADEMY OF SCIENCES-TECHNICAL SCIENCES | 2007年 / 55卷 / 03期

关键词：

thin film; palladium catalyst; ZnO; methane sensor;

D O I：

暂无

中图分类号：

T [工业技术];

学科分类号：

08 ;

摘要：

Methane (CH4) sensitivity of zinc oxide (ZnO) thin film has been studied in the present work. The sensor element comprises of a chemically fabricated ZnO semiconducting layer and a layer of palladium (Pd) as catalyst. The catalyst layer was formed on the surface of semiconducting ZnO following a wet chemical process from palladium chloride (PdCl2) solution. Fundamental features of a sensor element e.g. sensitivity, response time and recovery process has been studied. The effect of operating temperature on performance of the sensor material has been investigated and a choice of optimum temperature was made at around 200 degrees C. The sensor element exhibited reasonable sensitivity of about 86% at this temperature in presence of 1 vol% methane (CH4) in air.

引用

页码：281 / 285

页数：5

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