Rheological (visco-elastic behaviour) analysis of cyclic olefin copolymers with application to hot embossing for microfabrication

Transparent, amorphous cyclic olefin copolymers (COCs) have been frequently used for the fabrication of microfluidic devices using a hot embossing technique for numerous applications. In hot embossing, the polymer is deformed near its glass transition temperature (Tg), i.e. between Tg and Tg + 60 degrees C where the viscoelastic properties of the material are dominant. The proper characterization of the viscoelastic properties is of interest as this can lead to a better understanding of polymer flow behaviour during microfabrication. Furthermore, the ability to model its rheological behaviour will enable the prediction of the optimal hot embossing processing parameters. We performed small amplitude oscillatory shear experiments on four grades of COCs, TOPAS-8007, TOPAS-5013, TOPAS-6015 and TOPAS-6017, in order to characterize their flow behaviour. The experiments were conducted within the frequency range from 0.01 to 500 Hz at between Tg + 20 and Tg + 60 degrees C. The flow properties could be represented using a generalized Maxwell viscoelastic constitutive model with Williams-Landel-Ferry-type temperature dependence. Good fit of the experimental data was obtained over a wide range of temperatures. The model could be coupled with ABAQUS finite element software to predict the optimal conditions for fabricating a capillary electrophoresis micro-chip on a TOPAS-5013 substrate by hot embossing.