Fracture characterization of inhomogeneous wrinkled metallic films deposited on soft substrates

被引:2
|
作者
Kishida, Hiroshi [1 ]
Ishizaka, Satoshi [1 ]
Nagakura, Takumi [1 ]
Suzuki, Hiroaki [1 ]
Yonezu, Akio [1 ]
机构
[1] Chuo Univ, Dept Precis Mech, Bunkyo Ku, 1-13-27 Kasuga, Tokyo 1128551, Japan
基金
日本学术振兴会;
关键词
metallic thin films; soft substrate; wrinkled structure; tensile deformation; crack density; finite element method; NANOSCALE THIN-FILMS; ELECTRON-MICROSCOPE; DEFORMATION; CONDUCTORS; TOUGHNESS; TENSILE;
D O I
10.1088/1361-6463/aa95cb
中图分类号
O59 [应用物理学];
学科分类号
摘要
This study investigated the fracture properties of wrinkled metallic films on a polydimethylsiloxane (PDMS) soft substrate. In particular, the crack density of the wrinkled film during tensile deformation was examined. In order to achieve better deformability of metallic thin films, a method to fabricate a wrinkled thin film on a PDMS soft substrate was first established. The copper (Cu) nano-film fabricated in this study possessed a wrinkled geometry, which plays a critical role in determining the extent of large elastic deformation. To create the wrinkled structure, wet-etching with a polymeric sacrificial layer was used. A sacrificial layer was first deposited onto a silicone rubber sheet. During the curing process of the layer, a compressive strain was applied such that the hardened surface layer buckled, and a wrinkled form was obtained. Subsequently, a PDMS solution was used to cover the layer in order to form a wrinkled PDMS substrate. Finally, the Cu film was deposited onto the wrinkled PDMS, such that the wrinkled Cu film on a soft PDMS substrate was fabricated. The use of uni-axial tensile tests resulted in film crack generation at the stress concentration zone in the wrinkled structure of the films. When the tensile loading was increased, the number of cracks increased. It was found that the increase in crack density was strongly related to the inhomogeneous nature of the wrinkled structure. Such a trend in crack density was investigated using FEM (finite element method) computations, such that this study established a simple mechanical model that may be used to predict the increase in crack density during tensile deformation. This model was verified through several experiments using various wrinkle patterns. The proposed mechanical model may be useful to predict the crack density of a wrinkled metallic film subject to tensile loading.
引用
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页数:11
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