Edge self-interference of a laser beam and application to thin film metrology

被引：0
|
作者：
Do, P. A. [1 ]
Touaibia, Mohamed [2 ]
Hache, A. [1 ]
机构：
[1] Univ Moncton, Dept Phys & Astron, Thin Films & Photon Res Grp GCMP, Moncton, NB E1A 3E9, Canada
[2] Univ Moncton, Dept Chem, Moncton, NB E1A 3E9, Canada
来源：
2013 CONFERENCE ON LASERS AND ELECTRO-OPTICS (CLEO) | 2013年
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D O I：
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中图分类号：
TM [电工技术]; TN [电子技术、通信技术];
学科分类号：
0808 ; 0809 ;
摘要：
A method for measuring optical thickness changes in a thin film using a single laser beam is proposed and demonstrated. Theory suggests that when a half plane phase shift is applied to a Gaussian laser beam, interference fringes appear in the far field which position varies with the amount of phase shift. By measuring fringe pattern displacements, we demonstrate detection of optical changes in microns-thick chitosan films induced by temperature rises of a few degrees centigrade. Potential use for surface temperature measurements and other applications are discussed.
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页数：2
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