Accurate measurement at the nanoscale of remnant polarisation charge in ferroelectric films

被引：0
|
作者：
Martin, Simon [1 ]
Baboux, Nicolas [1 ]
Albertini, David [1 ]
Gautier, Brice [1 ]
机构：
[1] Univ Lyon, CNRS, UMR 5270, Inst Nanotechnol Lyon,Inst Natl Sci Appl Lyon, 7 Ave Capelle, F-69621 Villeurbanne, France
来源：
2018 CONFERENCE ON PRECISION ELECTROMAGNETIC MEASUREMENTS (CPEM 2018) | 2018年
关键词：
Atomic Force Microscopy; nanoscale current measurement; remnant polarisation; ferroelectric materials;
D O I：
暂无
中图分类号：
TM [电工技术]; TN [电子技术、通信技术];
学科分类号：
0808 ; 0809 ;
摘要：
A method for the measurement of the remnant polarisation charge of ferroelectric films at the nanoscale is proposed. It is based on current measurement by an atomic force microscope and imposes a capacitive correction in order to extract the signal from the noise, several orders of magnitude higher than the signal to be measured. A remnant charge of 4.2 fC could be measured on a PbZrTiO3 thin film. Solutions to decrease the noise are proposed.
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页数：2
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