SAW UV Sensor Based on ZnO and Al-doped ZnO Nanorods

被引：0
|
作者：
Orlov, Anatolii [1 ]
Ulianova, Veronika [1 ]
Yakimenko, Yuriy [1 ]
Bogdan, Oleksandr [2 ]
Pashkevich, Genadzi [2 ]
机构：
[1] Natl Tech Univ Ukraine KPI, Dept Microelect, Kiev, Ukraine
[2] Natl Tech Univ Ukraine KPI, Appl Elect Res Inst, Kiev, Ukraine
来源：
2015 IEEE 35TH INTERNATIONAL CONFERENCE ON ELECTRONICS AND NANOTECHNOLOGY (ELNANO) | 2015年
关键词：
ultraviolet sensor; surface acoustic wave; reversing multistrip coupler; ZnO nanorod; Al-doped ZnO nanorod; ULTRAVIOLET; LAYER;
D O I：
暂无
中图分类号：
TM [电工技术]; TN [电子技术、通信技术];
学科分类号：
0808 ; 0809 ;
摘要：
The original results of the development of ultraviolet sensor based on surface acoustic wave resonator with apodized interdigital transducers and reversing multistrip coupler were presented. ZnO nanorods or Al-doped nanorods grown by hydrothermal method were applied as sensing layer. The frequency shift for the modified with ZnO nanorods sensor was about 150 kHz while for the modified with Al-doped ZnO nanorods sensor the frequency shift was about 100 kHz. Both types of coating provided excellent selectivity for ultraviolet radiation. The ultraviolet sensor based on surface acoustic waves demonstrated good repeatability but complete recovery of the central frequency was about 60 min.
引用
收藏
页码：161 / 164
页数：4
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