Electrochemical and optical processing of micro structures by scanning probe microscopy (SPM)

被引：3
|
作者：
Suda, M [1 ]
Nakajima, K [1 ]
Furuta, K [1 ]
Mitsuoka, Y [1 ]
Sakuhara, T [1 ]
Ataka, T [1 ]
机构：
[1] SEIKO INSTRUMENTS INC,RES LAB ADV TECHNOL,MATSUDO,CHIBA 271,JAPAN
来源：
NINTH ANNUAL INTERNATIONAL WORKSHOP ON MICRO ELECTRO MECHANICAL SYSTEMS, IEEE PROCEEDINGS: AN INVESTIGATION OF MICRO STRUCTURES, SENSORS, ACTUATORS, MACHINES AND SYSTEMS | 1996年
关键词：
D O I：
10.1109/MEMSYS.1996.493997
中图分类号：
TP [自动化技术、计算机技术];
学科分类号：
0812 ;
摘要：
引用
收藏
页码：296 / 300
页数：5
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