Scanning distortion correction in STEM images

被引：26
|
作者：
Ning, Shoucong [1 ,2 ,3 ]
Fujita, Takeshi [4 ]
Nie, Anmin [1 ,2 ]
Wang, Ziqian [4 ,5 ]
Xu, Xiandong [4 ]
Chen, Jianghua [6 ]
Chen, Mingwei [4 ,5 ]
Yao, Shuhuai [3 ]
Zhang, Tong-Yi [1 ,2 ]
机构：
[1] Shanghai Univ, Mat Genome Inst, 99 Shangda Rd, Shanghai 200444, Peoples R China
[2] Shanghai Univ, Shanghai Mat Genome Inst, 99 Shangda Rd, Shanghai 200444, Peoples R China
[3] Hong Kong Univ Sci & Technol, Dept Mech & Aerosp Engn, Kowloon, Hong Kong, Peoples R China
[4] Tohoku Univ, WPI Adv Inst Mat Res, Sendai, Miyagi 9808577, Japan
[5] Tohoku Univ, Grad Sch Engn, Dept Mat Sci, Sendai, Miyagi 9808577, Japan
[6] Hunan Univ, Dept Mat Sci & Engn, Changsha 410082, Hunan, Peoples R China
来源：
ULTRAMICROSCOPY | 2018年 / 184卷
关键词：
Scanning distortion; STEM; Image registration; Delaunay triangulation; Finite element method; FIELD ELECTRON-MICROSCOPY; RESOLUTION; COLUMNS;
D O I：
10.1016/j.ultramic.2017.09.003
中图分类号：
TH742 [显微镜];
学科分类号：
摘要：
Various disturbances do exist in the image taking process of scanning transmission electron microscopes (STEM), which seriously reduces the resolution and accuracy of STEM images. In this paper, a deep understanding of the scanning distortion influence on the real and reciprocal spaces of STEM images is achieved via theoretical modeling and simulation. A scanning distortion correction algorithm is further developed based on two images scanned along perpendicular directions, which is able to effectively correct scanning distortion induced deviations and significantly increase the signal to noise ratio of STEM images. (C) 2017 Elsevier B.V. All rights reserved.
引用
收藏
页码：274 / 283
页数：10
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