Surface micro-structuring using polymer elongation

被引：1
|
作者：
Kaneko, Arata [1 ]
Kobayashi, Hayato [1 ]
Moronuki, Nobuyuki [1 ]
机构：
[1] Tokyo Metropolitan Univ, Tokyo 1910065, Japan
来源：
ADVANCED PRECISION ENGINEERING | 2010年 / 447-448卷
关键词：
micro-structure; photo-polymer; high-aspect structure; elongation;
D O I：
10.4028/www.scientific.net/KEM.447-448.685
中图分类号：
T [工业技术];
学科分类号：
08 ;
摘要：
High-aspect structures are fabricated by photo-polymer elongation using a template. The template, tungsten wire of sub-mm diameter, makes SU-8 film locally stretched and deformed in long and fine fibrous geometry. The aspect ratio of fabricated structure becomes over 8, while the finest diameter is less than 10 mu m. Both of surface tension and viscosity of SU-8 film determines the yield of fibrous micro-structure. The wire diameter and drawing distance allow one to obtain desired profile of structure. Fibrous structures can be hexagonally aligned utilizing appropriate template with specific diameter and pitch of wire designed based on an analysis of surface energy.
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页码：685 / 689
页数：5
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