Bending characteristics of SU-8

被引：10

作者：

Spratley, J. P. F. ^{[1
]}

Ward, M. C. L. ^{[1
]}

Hall, P. S. ^{[1
]}

机构：

[1] Univ Birmingham, Sch Engn, Birmingham B15 2TT, W Midlands, England

来源：

MICRO & NANO LETTERS | 2007年 / 2卷 / 02期

关键词：

D O I：

10.1049/mnl:20070022

中图分类号：

TB3 [工程材料学];

学科分类号：

0805 ; 080502 ;

摘要：

This study characterises SU-8's material properties under large deformations in out-of-plane bending. A novel test setup is presented to deform the SU-8 to high levels, and a mathematical model presented that accurately predicts the results. This test shows that hard-baked SU-8, with a Young's modulus tested at 1.9 GPa, is capable of undergoing stresses of up to 120 MPa before failure and in some cases will undergo plastic deformation.

引用

页码：20 / 23

页数：4

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