Micro-fabricated spectral analysers

被引：0

作者：

Manzardo, O ^{[1
]}

Petremand, Y ^{[1
]}

Herzig, HP ^{[1
]}

Noell, W ^{[1
]}

De Rooij, N ^{[1
]}

机构：

[1] Univ Neuchatel, Inst Microtechnol, CH-2000 Neuchatel, Switzerland

来源：

OPTICS FOR THE QUALITY OF LIFE, PTS 1 AND 2 | 2003年 / 4829卷

关键词：

micro-optic electro-mechanical systems (MOEMS); actuators; sensors;

D O I：

10.1117/12.530940

中图分类号：

T [工业技术];

学科分类号：

08 ;

摘要：

We present several devices using different spectroscopic concepts. First, we show the successive steps and improvements in connection with the Michelson interferometer which we have already realized, in particular the use of fibers to bring in and collimate the light. A-possible method to obtain micro-optical elements that are suitable for integration on the interferometer chip is proposed. Then, we present a lamellar. grating interferometer, an array of commutable slits to realize a Hadamard transformer, and a movable curved diffraction grating. All of these devices have been realized by silicon micro-machining, more particularly with silicon-on-insulator (SOI) technology.

引用

页码：841 / 843

页数：3

共 50 条

[1] Simulation of a micro-fabricated inclinometer
Reichardt, M
Mescheder, U
Nosseir, N
[J]. METMBS'00: PROCEEDINGS OF THE INTERNATIONAL CONFERENCE ON MATHEMATICS AND ENGINEERING TECHNIQUES IN MEDICINE AND BIOLOGICAL SCIENCES, VOLS I AND II, 2000, : 309 - 314
[2] Micro-fabricated electrolytic micro-bubblers
Lee, S
Sutomo, W
Liu, C
Loth, E
[J]. INTERNATIONAL JOURNAL OF MULTIPHASE FLOW, 2005, 31 (06) : 706 - 722
[3] Micro-Fabricated Substrates to Study Mechanotransduction
Le Digabel, Jimmy
[J]. BIOPHYSICAL JOURNAL, 2011, 100 (03) : 444 - 444
[4] Micro-fabricated system for wavelengths monitoring
Manzardo, O
Petremand, Y
Herzig, HP
Noell, W
De Rooij, N
[J]. 2002 IEEE/LEOS INTERNATIONAL CONFERENCE ON OPTICAL MEMS, CONFERENCE DIGEST, 2002, : 23 - 24
[5] Fluid filling into micro-fabricated reservoirs
Tseng, FG
Yang, ID
Lin, KH
Ma, KT
Lu, MC
Tseng, YT
Chieng, CC
[J]. SENSORS AND ACTUATORS A-PHYSICAL, 2002, 97-8 : 131 - 138
[6] Micro-fabricated stylus ion trap
Arrington, Christian L.
McKay, Kyle S.
Baca, Ehren D.
Coleman, Jonathan J.
Colombe, Yves
Finnegan, Patrick
Hite, Dustin A.
Hollowell, Andrew E.
Joerdens, Robert
Jost, John D.
Leibfried, Dietrich
Rowen, Adam M.
Warring, Ulrich
Weides, Martin
Wilson, Andrew C.
Wineland, David J.
Pappas, David P.
[J]. REVIEW OF SCIENTIFIC INSTRUMENTS, 2013, 84 (08):
[7] Control of Magnetotactic Bacterium in a Micro-Fabricated Maze
Khalil, Islam S. M.
Pichel, Marc P.
Reefman, Bart A.
Sukas, Ozlem Sardan
Abelmann, Leon
Misra, Sarthak
[J]. 2013 IEEE INTERNATIONAL CONFERENCE ON ROBOTICS AND AUTOMATION (ICRA), 2013, : 5508 - 5513
[8] A Micro-fabricated Hexagonal Digital Electromagnetic Actuator
Deshmukh, Ajinkya
Petit, Laurent
Khan, Muneeb Ullah
Prelle, Christine
[J]. 2019 IEEE/ASME INTERNATIONAL CONFERENCE ON ADVANCED INTELLIGENT MECHATRONICS (AIM), 2019, : 44 - 49
[9] Micro-fabricated components for cold atom sensors
McGilligan, J. P.
Gallacher, K.
Griffin, P. F.
Paul, D. J.
Arnold, A. S.
Riis, E.
[J]. REVIEW OF SCIENTIFIC INSTRUMENTS, 2022, 93 (09):
[10] OXIDATION OF MICRO-FABRICATED SILICON-CRYSTALS
AOKI, S
[J]. JOURNAL OF THE JAPAN INSTITUTE OF METALS, 1991, 55 (07) : 765 - 772

← 1 2 3 4 5 →