THREE-DIMENSION NUMERICAL SIMULATION OF A LARGE-SCALE RECTANGULAR SURFACE WAVE PLASMA SOURCE

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作者
Lan, Chaohui [1 ]
Zheng, Le [1 ]
Long, Jidong [1 ]
Peng, Yufei [1 ]
Li, Jie [1 ]
Yang, Zhen [1 ]
Dong, Pan [1 ]
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[1] China Acad Engn Phys, Inst Fluid Phys, Mianyang 621900, Peoples R China
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O35 [流体力学]; O53 [等离子体物理学];
学科分类号
070204 ; 080103 ; 080704 ;
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页数:1
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