共 50 条
- [1] Application of nonparametric approach to the rapid thermal processing systems modeling [J]. MODERN TECHNIQUES AND TECHNOLOGY: MTT' 2000, 2000, : 135 - 136
- [5] MODELING OF RAPID THERMAL-PROCESSING [J]. MICROELECTRONIC ENGINEERING, 1991, 10 (3-4) : 207 - 216
- [7] Modeling, measurement and control of rapid thermal processing [J]. TRANSIENT THERMAL PROCESSING TECHNIQUES IN ELECTRONIC MATERIALS, 1996, : 3 - 10
- [9] RAPID THERMAL-PROCESSING FOR VLSI APPLICATION [J]. EPM 87: ENERGY PULSE AND PARTICLE BEAM MODIFICATION OF MATERIALS, 1988, 8 : 80 - 86