Ion-beam assisted, electron-beam physical vapor deposition

被引：0
|
作者：
Singh, J [1 ]
机构：
[1] Penn State Univ, University Pk, PA 16802 USA
来源：
ADVANCED MATERIALS & PROCESSES | 1996年 / 150卷 / 06期
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D O I：
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中图分类号：
T [工业技术];
学科分类号：
08 ;
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页码：27 / 28
页数：2
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