共 50 条
- [3] Multi-layered piezoelectric bimorph actuator [J]. MHS'97: PROCEEDINGS OF 1997 INTERNATIONAL SYMPOSIUM ON MICROMECHATRONICS AND HUMAN SCIENCE, 1997, : 73 - 78
- [4] Displacement Analysis of a Piezoelectric Based Multi-layered Micropump Diaphragm [J]. Iranian Journal of Science and Technology, Transactions of Mechanical Engineering, 2021, 45 : 77 - 90
- [6] Preparation of lead-free multi-layered piezoelectric actuator [J]. ELECTROCERAMICS IN JAPAN IX, 2006, 320 : 11 - 14
- [8] Quick response dynamic focusing lens using multi-layered piezoelectric bimorph actuator [J]. MICRO-OPTO-ELECTRO-MECHANICAL SYSTEMS, 2000, 4075 : 24 - 31
- [9] Deflection of circular diaphragm-type piezoactuators coupling with gas compression in micropumps [J]. Microsystem Technologies, 2017, 23 : 5329 - 5341