Thermal stability of thin film corundum-type solid solutions of (Al1-xCrx)2O3 synthesized under low-temperature non-equilibrium conditions

被引：55
|
作者：
Ramm, Juergen [1 ]
Ante, Michael
Braendle, Hans
Neels, Antonia
Dommann, Alex
Doebeli, Max
机构：
[1] Oerlikon Balzers Coating AG, FL-9496 Balzers, Liechtenstein
[2] Ctr Suisse Elect & Microtech SA, CH-2002 Neuchatel, Switzerland
[3] Paul Scherrer Inst, CH-8093 Zurich, Switzerland
[4] ETH, CH-8093 Zurich, Switzerland
来源：
ADVANCED ENGINEERING MATERIALS | 2007年 / 9卷 / 07期
关键词：
D O I：
10.1002/adem.200700081
中图分类号：
T [工业技术];
学科分类号：
08 ;
摘要：
A novel cathodic arc evaporation process operated in pure oxygen forms corundum-type micro-crystalline structures at temperatures below 600°C. Thermally stable crystalline solid solutions of corundum-type (Al 1-xCrx)2Oy have been prepared with this method for x ≥ 0.3 at non-equilibrium conditions. The stability in (Al,Cr)2O3 phases can be explained by their degree of crystallinity and ordering within the structure. The applied processing method results in highly crystalline coatings of pure α-(Al1-xCr x)2Oy. With increasing fabrication temperature (maximum 600°), more stable phases are obtained showing no metal site splitting in the atomic structure. © 2007 WILEY-VCH Verlag GmbH & Co. KGaA,.
引用
收藏
页码：604 / 608
页数：5
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