Laser picosecond ultrasonic measurement of longitudinal sound velocity in nanometer thin films

被引:0
|
作者
Pu, N. W. [1 ]
Kuo, W. I. [2 ]
机构
[1] Natl Def Univ, Chung Cheng Inst Technol, Dept Appl Chem & Mat Sci, Tao Yuan 335, Taiwan
[2] Natl Def Univ, Sch Def Sci, Chung Cheng Inst Technol, Tao Yuan 335, Taiwan
关键词
picosecond ultrasonics; sound velocity; nanometer thin films; multilayer;
D O I
暂无
中图分类号
T [工业技术];
学科分类号
08 ;
摘要
We demonstrate applications of ultrafast-laser-based picosecond ultrasonic techniques to sound velocity measurement in nanometer thin films. The longitudinal sound velocities in various thin films (100 similar to 300 nm thick) were directly determined by pulse-echo technique. Many of the measured velocities deviate from the bulk values significantly and show strong dependence on the growth conditions. To overcome the problems such as echo overlapping and reduced accuracy in much thinner films, we further propose a method capable of measuring the sound velocity in films thinner than 10 run. By measuring the effective sound velocities of periodic multilayer stacks with different thickness ratios, the velocities of individual constituents can be extracted using the superlattice phonon dispersion relation. The longitudinal sound velocities in ion-beam sputtered Mo and amorphous Si films of 2 similar to 5 nm thickness have been determined using this method. We have also performed theoretical calculations on the laser generation and detection of acoustic pulses in multilayers. The pulse shapes and spectra of acoustic waves were analyzed, and the results agree well with the experimental results.
引用
收藏
页码:286 / +
页数:2
相关论文
共 50 条
  • [1] Pulse-echo measurement of longitudinal sound velocity in nanometer thin films
    Pu, NW
    Li, TC
    [J]. APPLIED PHYSICS B-LASERS AND OPTICS, 2006, 82 (03): : 449 - 453
  • [2] Pulse-echo measurement of longitudinal sound velocity in nanometer thin films
    N.W. Pu
    T.C. Li
    [J]. Applied Physics B, 2006, 82 : 449 - 453
  • [3] THICKNESS AND SOUND-VELOCITY MEASUREMENT IN THIN TRANSPARENT FILMS WITH LASER PICOSECOND ACOUSTICS
    WRIGHT, OB
    [J]. JOURNAL OF APPLIED PHYSICS, 1992, 71 (04) : 1617 - 1629
  • [4] Picosecond ultrasonic measurement of the velocity of phonons in water
    Shelton, LJ
    Yang, F
    Ford, WK
    Maris, HJ
    [J]. PHYSICA STATUS SOLIDI B-BASIC SOLID STATE PHYSICS, 2005, 242 (07): : 1379 - 1382
  • [5] A sound velocity measurement system for thin steel sheet based on ultrasonic interferometry
    Ichikawa, F
    Takada, H
    Asano, K
    Sadahiro, K
    [J]. TETSU TO HAGANE-JOURNAL OF THE IRON AND STEEL INSTITUTE OF JAPAN, 1997, 83 (04): : 245 - 250
  • [6] Laser ultrasonic measurement of mechanical properties of nanometer-sized thin film structures
    Hernandez, CA
    Murray, TW
    Krishnaswamy, S
    [J]. REVIEW OF PROGRESS IN QUANTITATIVE NONDESTRUCTIVE EVALUATION, VOLS 21A & B, 2002, 615 : 1187 - 1192
  • [7] High-laser-wavelength sensitivity of the picosecond ultrasonic response in transparent thin films
    Devos, A.
    Robillard, J. -F.
    Cote, R.
    Emery, P.
    [J]. PHYSICAL REVIEW B, 2006, 74 (06):
  • [8] RETRACTED: Temperature behavior of sound velocity of SiON thin films studied by picosecond ultrasound (Retracted Article)
    Tsuboi, Seiya
    Ogi, Hirotsugu
    Nagakubo, Akira
    Nakamura, Nobutomo
    Matsuda, Satoru
    Kabe, Yoshiro
    [J]. 2017 IEEE INTERNATIONAL ULTRASONICS SYMPOSIUM (IUS), 2017,
  • [9] Picosecond laser ablation of thin copper films
    Jandeleit, J.
    Urbasch, G.
    Hoffmann, H.D.
    Treusch, H.-G.
    Kreutz, E.W.
    [J]. Applied Physics A: Materials Science and Processing, 1996, 63 (02): : 117 - 121
  • [10] Picosecond laser ablation of thin copper films
    Jandeleit, J
    Urbasch, G
    Hoffmann, HD
    Treusch, HG
    Kreutz, EW
    [J]. APPLIED PHYSICS A-MATERIALS SCIENCE & PROCESSING, 1996, 63 (02): : 117 - 121