Introduction to the special section on Petri nets in semiconductor manufacturing

被引：0

作者：

Jeng, MD ^{[1
]}

Zhou, M

机构：

[1] Natl Taiwan Ocean Univ, Dept Elect Engn, Keelung 202, Taiwan

[2] New Jersey Inst Technol, Dept Elect & Comp Engn, Newark, NJ 07102 USA

来源：

IEEE TRANSACTIONS ON SEMICONDUCTOR MANUFACTURING | 1998年 / 11卷 / 03期

关键词：

D O I：

暂无

中图分类号：

T [工业技术];

学科分类号：

08 ;

摘要：

引用

页码：330 / 332

页数：3

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