Study on range distribution parameters for fluorine ion implantation in KTiOAsO4 crystals at low velocity

被引：1
|
作者：
Liu, XD [1 ]
Xia, YY
Lu, QM
Li, F
Tan, ZY
Xia, HH
Song, C
Xu, XG
机构：
[1] Shandong Univ, Dept Phys, Jinan 250100, Peoples R China
[2] Shandong Univ, Sch Chem, Jinan 250100, Peoples R China
[3] Shandong Univ, Sch Elect Engn, Jinan 250100, Peoples R China
[4] Shandong Univ, State Key Lab Crystal Mat, Jinan 250100, Peoples R China
[5] Shandong Univ, Inst Crystal Mat, Jinan 250100, Peoples R China
来源：
MATERIALS SCIENCE AND ENGINEERING B-SOLID STATE MATERIALS FOR ADVANCED TECHNOLOGY | 2005年 / 117卷 / 03期
基金：
中国国家自然科学基金;
关键词：
resonant nuclear reaction; range distribution; KTiOAsO4;
D O I：
10.1016/j.mseb.2004.12.004
中图分类号：
T [工业技术];
学科分类号：
08 ;
摘要：
Range distributions for fluorine ions in F-19(+)-implanted KTiOAsO4 (KTA) in an energy range of 80-350keV were measured by using the F-19(p, alpha gamma)O-16 resonant nuclear reaction at ER = 872.1 keV, with width Gamma=4.2keV. A proper convolution calculation method was used to extract the true distributions of fluorine from the experimental excitation yield curves. The experimental range distribution parameters, R-P and Delta R-P, were compared with those obtained from Monte Carlo simulation codes. (c) 2004 Elsevier B.V. All rights reserved.
引用
收藏
页码：355 / 358
页数：4
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