A novel Six-DOF electromagnetic precision positioner utilizing hybrid magnetic and fluid mechanism

被引：0

作者：

Huang, Sheng-Chih ^{[1
]}

Hung, Shao-Kang ^{[1
]}

Chen, Mei-Yung ^{[3
]}

Lin, Chih-Hsien ^{[1
]}

Fu, Li-Chen ^{[1
,2
]}

机构：

[1] Natl Taiwan Univ, Dept Elect Engn, Taipei 10764, Taiwan

[2] Natl Taiwan Univ, Dept Comp Sci & Informat Engn, Taipei, Taiwan

[3] Natl Taiwan Univ, Dept Mechatron Technol, Taipei, Taiwan

来源：

IECON 2007: 33RD ANNUAL CONFERENCE OF THE IEEE INDUSTRIAL ELECTRONICS SOCIETY, VOLS 1-3, CONFERENCE PROCEEDINGS | 2007年

关键词：

hybrid magnetic and fluid mechanism; precision motion control; positioner;

D O I：

10.1109/IECON.2007.4460161

中图分类号：

T [工业技术];

学科分类号：

08 ;

摘要：

In this paper, we present a novel mechanism and system implementation of six degree-of-freedom (DOF) electromagnetic-actuating positioner. The design of a novel mechanism utilizes hybrid magnetic and fluid mechanism to achieve two goals: 1) sufficient damping, 2) balancing the weight of the carrier utilizing buoyancy of fluid and achieving low power consumption. The novel mechanism and electromagnetic actuators are combined and the overall dynamic model is also derived. The positioner presented herein shows a large travel range of 3mm x 3mm x 4mm with a positioning resolution of +/-10 mu m, which is close to the limit of the equipped sensors. We demonstrate the satisfactory performance of the positioner, with precision, theoretical analysis and experimental results.

引用

页码：822 / +

页数：2

共 50 条

[1] Design and Implementation of a New Six-DOF Maglev Positioner With a Fluid Bearing
Chen, Mei-Yung
Huang, Sheng-Chih
Hung, Shao-Kang
Fu, Li-Chen
IEEE-ASME TRANSACTIONS ON MECHATRONICS, 2011, 16 (03) : 449 - 458
[2] A six-DOF vibration energy harvester based on the six-DOF parallel mechanism
Yuan, G.
Wang, D. H.
ACTIVE AND PASSIVE SMART STRUCTURES AND INTEGRATED SYSTEMS 2015, 2015, 9431
[3] Kinematic analysis of a flexible six-DOF parallel mechanism
Jing, Feng-Shui
Tan, Min
Hou, Zeng-Guang
Liang, Zi-Ze
Wang, Yun-Kuan
Gupta, Madan M.
Nikiforuk, Peter N.
IEEE TRANSACTIONS ON SYSTEMS MAN AND CYBERNETICS PART B-CYBERNETICS, 2006, 36 (02): : 379 - 389
[4] Magnetically Levitated Six-DOF Precision Positioning Stage With Uncertain Payload
Basovich, Sergei
Arogeti, Shai A.
Menaker, Yonattan
Brand, Ziv
IEEE-ASME TRANSACTIONS ON MECHATRONICS, 2016, 21 (02) : 660 - 673
[5] A NEW SIX-DOF PARALLEL MECHANISM FOR CAPTIVE MODEL TEST
Lu, Yun
Wu, Jinbo
Li, Weijia
Wu, Yaozhong
POLISH MARITIME RESEARCH, 2020, 27 (03) : 4 - 15
[6] Extended range six DOF high-precision positioner for wafer processing
Hu, Tiejun
Kim, Won-Jong
IEEE-ASME TRANSACTIONS ON MECHATRONICS, 2006, 11 (06) : 682 - 689
[7] Geometric algebra approach to analyzing the singularity of six-DOF parallel mechanism
Cheng, Shili
Ji, Ping
JOURNAL OF ADVANCED MECHANICAL DESIGN SYSTEMS AND MANUFACTURING, 2019, 13 (04)
[8] Trajectory Planning of a Six-DOF Robot Based on a Hybrid Optimization Algorithm
Jin, Xing
Kang, Junfeng
Zhang, Jingjing
Yang, Xiang
PROCEEDINGS OF 2016 9TH INTERNATIONAL SYMPOSIUM ON COMPUTATIONAL INTELLIGENCE AND DESIGN (ISCID), VOL 2, 2016, : 148 - 151
[9] Design and kinematic simulation for six-DOF leg mechanism of hexapod robot
Gao, Jianhua
2006 IEEE INTERNATIONAL CONFERENCE ON ROBOTICS AND BIOMIMETICS, VOLS 1-3, 2006, : 625 - 629
[10] Design and Control of a Novel Six-DOF Maglev Platform For Positioning and Vibration Isolation
Gong, Zhaopei
Ding, Liang
Gao, Haibo
Yue, Honghao
Liu, Rongqiang
Deng, Zongquan
2017 2ND INTERNATIONAL CONFERENCE ON ADVANCED ROBOTICS AND MECHATRONICS (ICARM), 2017, : 155 - 160

← 1 2 3 4 5 →