Nanotension and nanocharacterization research of anodic aluminum oxide film

Using piezoelectric ceramic as actuator and elliptical flexure hinge as locomotive structure, a symmetric structure instrument was designed to carry out the nanotension function. On-line nanomeasurement and in-situ scanning of nanoindentation function after unloading was completed by nanotension instrument cooperated with nanoindenter. Nanomechanics property was measured at the max load 5000, 8000, and 12 000 mu N and between the tension displacement 0 similar to 12.5 mu m, respectively. Nanohardness and elastic modulus of 50 nm AAO film are 4.77, 4.26, 4.36, 4.01, 4.3, 3.98 GPa and 1.68, 1.28, 1.29, 1.07, 1.21, 1.07 GPa with the different displacement 0, 2.5, 5, 7.5, 10, 12.5 pm at the max load 5000 LN, respectively. The experimental results show that nanohardness and elastic modulus decreases vibratively as tension displacement increases at the max load 5000, 8000 mu N, respectively. While nanohardness and elastic modulus decreases linearly as tension displacement increases, and obvious plastic deformation of nanoindentaion impression occurs during the tension process at the max load 12 000 mu N.