Fiber-Optic Temperature Sensor Based on Difference of Thermal Expansion Coefficient Between Fused Silica and Metallic Materials

被引:44
|
作者
Li, Xuefeng [1 ]
Lin, Shuo [1 ]
Liang, Jinxing [2 ]
Zhang, Yupeng [1 ]
Oigawa, Hiroshi [1 ]
Ueda, Toshitsugu [1 ]
机构
[1] Waseda Univ, Grad Sch Informat Prod & Syst, Kitakyushu, Fukuoka 8080135, Japan
[2] Southeast Univ, Sch Instrument Sci & Engn, Nanjing 210096, Jiangshu, Peoples R China
来源
IEEE PHOTONICS JOURNAL | 2012年 / 4卷 / 01期
关键词
Fabry-Perot interferometric (FFPI); fiber sensor; thermal expansion coefficient; focused ion beam milling; FABRY-PEROT-INTERFEROMETER; PHOTONIC CRYSTAL FIBER; RECENT PROGRESS;
D O I
10.1109/JPHOT.2011.2181943
中图分类号
TM [电工技术]; TN [电子技术、通信技术];
学科分类号
0808 ; 0809 ;
摘要
In this paper, we report a novel fiber-optic Fabry-Perot interferometric (FFPI) temperature sensor based on the difference of thermal expansion coefficient between fused silica and metallic materials. The sensor head is made by a single-mode fiber (SMF). A gold film and a nickel film are sputtered and electroplated on the surface of the SMF. Then, a microcavity is micromachined by focused ion beam (FIB) milling. Because the thermal expansion coefficient of nickel is about 20 times of fused silica, the different thermal expansions force the sensor head to bend when the temperature is high or low. Its temperature sensitivity is over 14 pm/degrees C in a wide range from -79 degrees C to + 70 degrees C. And the coefficient of determination R-2 is excellent (over 0.995). Moreover, the metallic cylinder can reinforce the cavity spot of the fiber sensor, so that this kind of sensor can work in harsh environments. For the first time to the best of our knowledge, we report this type of FFPI temperature sensor based on difference of thermal expansion coefficient between fused silica and metallic materials.
引用
收藏
页码:155 / 162
页数:8
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