Development of an Adaptive Optical System for Sub-10-nm Focusing of Synchrotron Radiation Hard X-rays

被引：8
|
作者：
Mimura, H. [1 ,2 ]
Kimura, T. [1 ,2 ]
Yokoyama, H. [1 ]
Yumoto, H. [3 ]
Matsuyama, S. [1 ,2 ]
Tamasaku, K. [3 ]
Koumura, Y. [3 ]
Yabashi, M. [3 ]
Ishikawa, T. [3 ]
Yamauchi, K. [1 ,2 ,3 ,4 ]
机构：
[1] Osaka Univ, Grad Sch Engn, Dept Precis Sci & Technol, 2-1 Yamada Oka, Suita, Osaka 5650871, Japan
[2] Japan Atom Energy Agcy, Kansai Photon Sci Inst, Mikazuki, Hyogo 6795148, Japan
[3] SPring 8 RIKEN, Mikazuki, Hyogo 6795148, Japan
[4] Osaka Univ, Grad Sch Engn, Ctr Ultraprecis Sci & Technol, Suita, Osaka 5650871, Japan
来源：
10TH INTERNATIONAL CONFERENCE ON X-RAY MICROSCOPY | 2011年 / 1365卷
基金：
日本科学技术振兴机构;
关键词：
Synchrotron radiation; adaptive optics; hard x-ray; nanofocusing; multilayer mirror optics; REFLECTIVE OPTICS; PERFORMANCE; MIRRORS; INTERFEROMETRY; REGION;
D O I：
10.1063/1.3625294
中图分类号：
TH742 [显微镜];
学科分类号：
摘要：
In the hard x-ray region, to obtain the theoretical resolution or diffraction-limited focusing size in an imaging optical system, both ultraprecise optics and highly accurate alignment are necessary. An adaptive optical system is used for the compensation of aberrations in various optical systems, such as optical microscopes and space telescopes. In situ wavefront control of hard x-rays is also effective for realizing ideal performance. The aim of this paper is to develop an adaptive optical system for sub-10-nm hard x-ray focusing. The adaptive optical system performs the wavefront measurement using a phase retrieval algorithm and wavefront control using grazing-incidence deformable mirrors. Several results of experiments using the developed system are reported.
引用
收藏
页码：13 / 17
页数：5
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