Optically-pumped lasing of semi-polar InGaN/GaN(1122) heterostructures

Results for long-wavelength emitters are presented for semi-polar InGaN/AlGaN/GaN heterostructures grown on GaN(1122)/m-sapphire templates by metalorganic chemical vapor deposition. The semi-polar GaN layers were 10 to 25 mu m thick and grown by HVPE on sapphire substrates. X-ray diffraction measurements indicate high crystallographic quality that approaches that of GaN(0001) layers on sapphire. Growth studies on the semi-polar GaN templates established the high efficiency of indium incorporation into InGaN layers, with a wide growth-temperature window up to 800 degrees C for green light emitting structures. Basic LEDs were fabricated with peak emission up to 527 nm wavelength. Further growth studies established conditions for growing reasonably smooth, undoped InGaN/GaN laser heterostructures suitable for optical pumping. Optically-pumped lasing was achieved at wavelengths from 400 nm up to 500 nm. The results demonstrate the viability of semi-polar GaN(1122) on sapphire templates for long-wavelength nitride laser diodes. (C) 2010 WILEY-VCH Verlag GmbH & Co. KGaA, Weinheim