共 50 条
- [1] Co-axial multicusp source for low axial energy spread ion beam production NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION A-ACCELERATORS SPECTROMETERS DETECTORS AND ASSOCIATED EQUIPMENT, 1999, 433 (03): : 579 - 586
- [2] BEAM INVESTIGATIONS AT A MULTICUSP ION-SOURCE REVIEW OF SCIENTIFIC INSTRUMENTS, 1992, 63 (04): : 2607 - 2609
- [4] THE LOW ENERGY RIBBON ION BEAM SOURCE AND TRANSPORT SYSTEM PROBLEMS OF ATOMIC SCIENCE AND TECHNOLOGY, 2006, (02): : 123 - 125
- [5] H- SOURCE AND LOW-ENERGY TRANSPORT FOR AN RFQ PREINJECTOR REVIEW OF SCIENTIFIC INSTRUMENTS, 1990, 61 (01): : 625 - 627
- [6] Performance of multicusp plasma ion source for focused ion beam applications JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B, 2000, 18 (06): : 3194 - 3197
- [7] Low energy ion beam transport IIT2002: ION IMPLANTATION TECHNOLOGY, PROCEEDINGS, 2003, : 359 - 364
- [9] H- beam emittance analysis in a multicusp ion source 19TH INTERNATIONAL CONFERENCE ON ION SOURCES - ICIS2021, 2022, 2244
- [10] OPTIMIZATION BEAM CURRENT OF MULTICUSP ION SOURCE BY MODIFYING STRUCTURE 2015 42ND IEEE INTERNATIONAL CONFERENCE ON PLASMA SCIENCES (ICOPS), 2015,