Temperature sensor of high-sensitivity based on nested ring resonator by Vernier effect

被引：8
|
作者：
Tian, Chengcai [1 ]
Zhang, Hao [2 ]
Li, Wenxiu [1 ]
Huang, Xin [1 ]
Liu, Jiaming [1 ]
Huang, Anping [1 ]
Xiao, Zhisong [1 ,3 ]
机构：
[1] Beihang Univ, Sch Phys, Key Lab Micronano Measurement Manipulat & Phys, Minist Educ, Beijing 100191, Peoples R China
[2] Beihang Univ, Res Inst Frontier Sci, Beijing 100191, Peoples R China
[3] Beijing Acad Quantum Informat Sci, Beijing 100193, Peoples R China
来源：
OPTIK | 2020年 / 204卷
基金：
中国国家自然科学基金;
关键词：
Temperature sensor; Vernier effect; Silicon-on-insulator; Ring resonator; Sensitivity; MACH-ZEHNDER INTERFEROMETER; MICRORING RESONATOR; TRANSMISSION;
D O I：
10.1016/j.ijleo.2019.164118
中图分类号：
O43 [光学];
学科分类号：
070207 ; 0803 ;
摘要：
A temperature sensor based on nested ring resonator (NRR) by Vernier effect is proposed and theoretically demonstrated with larger sensitivity. This configuration, on a standard silicon-on-insulator (SOI) chip, consists of a single ring resonator acting as the reference, and a NRR acting as the sensor, which can simultaneously achieve higher quality factor (Q) and larger free spectrum range (FSR) compared with single ring. By adjusting parameters of the NRR, the sensitivity of the whole structure can be 10.611 nm/K, two orders of magnitude larger than that of the single NRR.
引用
收藏
页数：9
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