Piezoelectric inchworm-type probe-approaching stepper

被引：3
|
作者：
Fu Xing [1 ]
Xiao Wenlan [1 ]
Xu Linyan [1 ]
机构：
[1] Tianjin Univ, State Key Lab Precis Measuring Technol & Instrume, Tianjin 300072, Peoples R China
来源：
SEVENTH INTERNATIONAL SYMPOSIUM ON PRECISION ENGINEERING MEASUREMENTS AND INSTRUMENTATION | 2011年 / 8321卷
关键词：
Flexure hinges; PZT stacks; FEA; ANSYS; Inchworm-style stepper; SPM; Laser interferometer; PIEZOMOTOR; ACTUATOR;
D O I：
10.1117/12.903935
中图分类号：
TM [电工技术]; TN [电子技术、通信技术];
学科分类号：
0808 ; 0809 ;
摘要：
A piezoelectronic inchworm-style stepper was designed for probe approaching in scanning probe microscope(SPM). The whole system consists of mechanical structures, hardware control units and PC software control units. Flexible hinges and three PZT stacks were used to constitute the stepper. ANSYS was utilized to analyze and optimize the structure of the mechanism. Three synchronous timing sequences were formed to drive the piezoelectric stacks. The performance of the stepper was tested by the laser interferometer. The deviation of each step is less than 31.2nm. With the advantages of no lubrication, less calorific value and high precision, its potential application is ultra-high vacuum environment.
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页数：6
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