Modeling of Piezoelectric Tube Resonators for Liquid Sensing Applications

被引:0
|
作者
Voglhuber-Brunnmaier, Thomas [1 ]
Antlinger, Hannes [1 ]
Jakoby, Bernhard [1 ]
Beigelbeck, Roman [2 ]
机构
[1] Johannes Kepler Univ Linz, Inst Microelect & Microsensors, Altenbergerstr 69, A-4040 Linz, Austria
[2] Vienna Univ Technol, Inst Sensor & Actuator Syst, A-1040 Vienna, Austria
来源
关键词
D O I
暂无
中图分类号
TM [电工技术]; TN [电子技术、通信技术];
学科分类号
0808 ; 0809 ;
摘要
A model for the electrical impedance of a fluidic piezoelectric tube sensor, resonating in thickness-wall-mode, is presented. The tube is mechanically loaded with acoustic impedances which represent the fluid properties. It is shown that the electrical impedance of a plane resonator model yields results very close to the tube model, if the static capacitance of the tube is used with the plane impedance expression. Therefore, the common transmission line models may furthermore be used with minor changes. Measurement results are compared with the cylindrical model and with the plane approximation.
引用
收藏
页码:1160 / 1163
页数:4
相关论文
共 50 条
  • [1] Micromechanical Piezoelectric-on-Silicon BAW Resonators for Sensing in Liquid Environments
    Prasad, Abhinav
    Seshia, Ashwin A.
    Charmet, Jerome
    2015 JOINT CONFERENCE OF THE IEEE INTERNATIONAL FREQUENCY CONTROL SYMPOSIUM & THE EUROPEAN FREQUENCY AND TIME FORUM (FCS), 2015, : 209 - 213
  • [2] Ultrasonic piezoelectric tube resonator for physical liquid property sensing
    Antlinger, H.
    Clara, S.
    Jakoby, B.
    Beigelbeck, R.
    Voglhuber-Brunnmaier, T.
    Cerimovic, S.
    Keplinger, F.
    2014 IEEE INTERNATIONAL ULTRASONICS SYMPOSIUM (IUS), 2014, : 2446 - 2449
  • [3] Pulled microcapillary tube resonators with electrical readout for mass sensing applications
    Lee, Donghyuk
    Kim, Joonhui
    Cho, Nam-Joon
    Kang, Taewook
    Kauh, Sangken
    Lee, Jungchul
    SCIENTIFIC REPORTS, 2016, 6
  • [4] Pulled microcapillary tube resonators with electrical readout for mass sensing applications
    Donghyuk Lee
    Joonhui Kim
    Nam-Joon Cho
    Taewook Kang
    Sangken Kauh
    Jungchul Lee
    Scientific Reports, 6
  • [5] HIGH PERFORMANCE PIEZOELECTRIC AlN MEMS RESONATORS FOR LIQUID SENSING AND BEYOND - THE POTENTIAL OF PIEZOMEMS
    Schmid, Ulrich
    Schneider, Michael
    2019 20TH INTERNATIONAL CONFERENCE ON SOLID-STATE SENSORS, ACTUATORS AND MICROSYSTEMS & EUROSENSORS XXXIII (TRANSDUCERS & EUROSENSORS XXXIII), 2019, : 653 - 654
  • [6] Investigation of film bulk acoustic resonators for sensing applications in liquid environment
    Zhou, Yu
    Zou, Yang
    Gao, Chao
    Xu, Qinwen
    Tong, Xin
    Lin, Binghui
    Liu, Yan
    Soon, Bo Woon
    Cai, Yao
    Sun, Chengliang
    APPLIED PHYSICS LETTERS, 2022, 121 (21)
  • [7] Modeling and Simulation of Thermally Actuated MEMS Resonators for Gas Sensing Applications
    Setiawan, L. F.
    Witjaksono, G.
    Ahmed, A. Y.
    2018 IEEE STUDENT CONFERENCE ON RESEARCH AND DEVELOPMENT (SCORED), 2018,
  • [8] Longitudinal Modes along Thin Piezoelectric Waveguides for Liquid Sensing Applications
    Caliendo, Cinzia
    SENSORS, 2015, 15 (06) : 12841 - 12856
  • [9] Novel electrode configurations of bulk acoustic wave resonators for liquid sensing applications
    Zhang, C
    Vetelino, JF
    2000 IEEE ULTRASONICS SYMPOSIUM PROCEEDINGS, VOLS 1 AND 2, 2000, : 421 - 426
  • [10] Weakly Coupled Piezoelectric MEMS Resonators for Aerosol Sensing
    Chellasivalingam, Malar
    Imran, Hassan
    Pandit, Milind
    Boies, Adam M.
    Seshia, Ashwin A.
    SENSORS, 2020, 20 (11)