Piezoelectric actuation of aluminum nitride contour mode optomechanical resonators

被引：16
|
作者：
Ghosh, Siddhartha [1 ]
Piazza, Gianluca [1 ]
机构：
[1] Carnegie Mellon Univ, Dept Elect & Comp Engn, Pittsburgh, PA 15213 USA
来源：
OPTICS EXPRESS | 2015年 / 23卷 / 12期
基金：
美国国家科学基金会;
关键词：
OSCILLATOR;
D O I：
10.1364/OE.23.015477
中图分类号：
O43 [光学];
学科分类号：
070207 ; 0803 ;
摘要：
We present a fully-integrated monolithic aluminum nitride optomechanical device in which lateral vibrations generated by a piezoelectric contour mode acoustic ring resonator are used to produce amplitude modulation of an optical signal in a whispering gallery mode photonic ring resonator. Acoustic and optical resonances are independently characterized in this contour mode optomechanical resonator (CMOMR). Electrically driven mechanical modes are optically detected at 35MHz, 654MHz and 884MHz. (C) 2015 Optical Society of America
引用
收藏
页码：15477 / 15490
页数：14
相关论文
共 50 条
  • [1] Piezoelectric aluminum nitride vibrating contour-mode MEMS resonators
    Piazza, Gianluca
    Stephanou, Philip J.
    Pisano, Albert P.
    [J]. JOURNAL OF MICROELECTROMECHANICAL SYSTEMS, 2006, 15 (06) : 1406 - 1418
  • [2] Damping in Aluminum Nitride Contour Mode MEMS Resonators
    Segovia-Fernandez, Jeronimo
    [J]. 2017 IEEE 60TH INTERNATIONAL MIDWEST SYMPOSIUM ON CIRCUITS AND SYSTEMS (MWSCAS), 2017, : 49 - 52
  • [3] Nonlinear Dynamics in Aluminum Nitride Contour-Mode Resonators
    Miller, Nicholas
    Piazza, Gianluca
    [J]. 2013 JOINT EUROPEAN FREQUENCY AND TIME FORUM & INTERNATIONAL FREQUENCY CONTROL SYMPOSIUM (EFTF/IFC), 2013, : 9 - 12
  • [4] GHZ CONTOUR EXTENSIONAL MODE ALUMINUM NITRIDE MEMS RESONATORS
    Stephanou, P. J.
    Pisano, A. P.
    [J]. 2006 IEEE ULTRASONICS SYMPOSIUM, VOLS 1-5, PROCEEDINGS, 2006, : 2401 - 2404
  • [5] Nonlinear dynamics in aluminum nitride contour-mode resonators
    Miller, Nicholas
    Piazza, Gianluca
    [J]. APPLIED PHYSICS LETTERS, 2014, 104 (01)
  • [6] Measurements of Frequency Fluctuations in Aluminum Nitride Contour-Mode Resonators
    Miller, Nicholas
    Piazza, Gianluca
    [J]. IEEE TRANSACTIONS ON ULTRASONICS FERROELECTRICS AND FREQUENCY CONTROL, 2014, 61 (06) : 913 - 919
  • [7] GHz aluminum nitride optomechanical wheel resonators
    Xiong, Chi
    Sun, Xiankai
    Fong, King Y.
    Tang, Hong X.
    [J]. 2012 IEEE INTERNATIONAL FREQUENCY CONTROL SYMPOSIUM (FCS), 2012,
  • [8] Piezoelectric aluminum nitride MEMS annular dual contour mode filter
    Stephanou, Philip J.
    Piazza, Gianluca
    White, Carolyn D.
    Wijesundara, Muthu B. J.
    Pisano, Albert P.
    [J]. SENSORS AND ACTUATORS A-PHYSICAL, 2007, 134 (01) : 152 - 160
  • [9] Mechanically coupled contour mode piezoelectric aluminum nitride MEMS filters
    Stephanou, PJ
    Piazza, G
    White, CD
    Wijesundara, MBJ
    Pisano, AP
    [J]. MEMS 2006: 19TH IEEE INTERNATIONAL CONFERENCE ON MICRO ELECTRO MECHANICAL SYSTEMS, TECHNICAL DIGEST, 2006, : 906 - 909
  • [10] Nanoscaled Piezoelectric Aluminum Nitride Contour-Mode Resonant Sensors
    Piazza, Gianluca
    Rinaldi, Matteo
    Zuniga, Chiara
    [J]. 2010 IEEE SENSORS, 2010, : 2202 - 2207
12345