Advances in research and applications of optical aspheric surface metrology

被引:23
|
作者
Liang Zi-jian [1 ]
Yang, Yong-ying [1 ]
Zhao, Hong-yang [1 ]
Liu, Sheng-an [1 ]
机构
[1] Zhejiang Univ, State Key Lab Modern Opt Instrumentat, Hangzhou 310027, Peoples R China
来源
CHINESE OPTICS | 2022年 / 15卷 / 02期
基金
中国国家自然科学基金;
关键词
aspheric surface testing; free-form surface testing; interferometry; null testing; non-null testing; SPATIAL LIGHT-MODULATOR; SUBAPERTURE STITCHING INTERFEROMETRY; COMPUTER-GENERATED HOLOGRAMS; FREE-FORM SURFACES; FREEFORM SURFACE; NULL LENS; SYSTEM; CALIBRATION; MIRROR; DEFLECTOMETRY;
D O I
10.37188/CO.2021-0143
中图分类号
O43 [光学];
学科分类号
070207 ; 0803 ;
摘要
Optical Systems using aspheric components (especially for free-form ones) have remarkable advantages over traditional spherical systems in that they can satisfy complicated requirements with simple optical-mechanical structures relying on abundant optional design parameters. Surface testing is an essential process for ensuring accuracy in manufacturing. Therefore, plenty of testing methods have been developed to meet varying testing demands of different types of surfaces at different stages in manufacturing. This paper summarizes the history of aspheric surface testing technology, classifies available techniques by whether they use interferometry, then introduces corresponding technical indexes, applicable conditions, research progress and applications. This paper highlights the high-precision interferometric methods, basic principles, optical layout and testing performances of every measurement method classified into Null and Non-null testing. The pros and cons of each method are compared, relative algorithms are introduced and precise adjustment methods are discussed.
引用
收藏
页码:161 / 186
页数:27
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