Transparent Conductive Al-Doped ZnO/Cu Bilayer Films Grown on Polymer Substrates at Room Temperature

被引：11
|
作者：
Huang Ji-Jie [1 ]
Wang Yu-Ping [1 ]
Lu Jian-Guo [1 ]
Gong Li [2 ]
Ye Zhi-Zhen [1 ]
机构：
[1] Zhejiang Univ, State Key Lab Silicon Mat, Dept Mat Sci & Engn, Hangzhou 310027, Peoples R China
[2] Changsha Univ Sci & Technol, Coll Mat Sci & Engn, Changsha 410015, Hunan, Peoples R China
来源：
CHINESE PHYSICS LETTERS | 2011年 / 28卷 / 12期
基金：
中国国家自然科学基金;
关键词：
ANNEALING TEMPERATURE; ELECTRODES;
D O I：
10.1088/0256-307X/28/12/127306
中图分类号：
O4 [物理学];
学科分类号：
0702 ;
摘要：
Al-doped ZnO (AZO)/Cu bi-layer films are deposited by dc magnetron sputtering on polycarbonate substrates at room temperature. The structural, electrical and optical properties of the films are investigated at various sputtering powers of the Cu layer. The AZO/Cu bi-layer film deposited at a moderate sputtering power of 180W for the Cu layer displayed the highest figure of merit of 3.47x10(-3) Omega(-1), with a low sheet resistance of 12.38 Omega/sq, an acceptable visible transmittance of 73%, and a high near-infrared reflectance of about 50%.
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页数：4
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