Application of a Novel Capacitive Sensor in Precise Positioning Systems

被引：0
|
作者：
Chen, Tao [1 ,2 ]
Chen, Liguo [1 ]
Pan, Mingqiang [1 ]
Sun, Lining [3 ]
机构：
[1] Soochow Univ, Robot & Microsyst Ctr, Suzhou, Peoples R China
[2] Chinese Acad Sci, State Key Lab Transducer Technol, Shanghai, Peoples R China
[3] Harbin Inst Technol, State Key Lab Robot & Syst, Harbin, Peoples R China
来源：
2011 6TH IEEE CONFERENCE ON INDUSTRIAL ELECTRONICS AND APPLICATIONS (ICIEA) | 2011年
关键词：
microelectromechanical systems (MEMS); capacitive displacement sensor; nano-positioning stage; comb-finger capacitance;
D O I：
暂无
中图分类号：
T [工业技术];
学科分类号：
08 ;
摘要：
This paper presents a comb-finger capacitive displacement sensor used in nano-positioning system. The displacement sensor is designed to develop an integrated implementation platform and to achieve its closed-loop control. In the design, offset constant-tooth, combinations with S-type beams and flexible cantilevers have been adopted to enhance the position range and structure performance. Surface and bulk micromachining technology is employed to fabricate the sensor from a single crystal silicon wafer. Through testing of the nano-positioning stage, the capability of the sensor has been obtained. The results show that this method can achieve a detect range of 10 mu m, with resolution of 5nm.
引用
收藏
页码：1712 / 1715
页数：4
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