Application of Pulsed Digital Oscillators in 'reverse mode' to eliminate undesired vibrations in high-Q MEMS resonators

被引:4
|
作者
Dominguez, Manuel [1 ]
Pons, Joan [1 ]
Ricart, Jordi [1 ]
机构
[1] Tech Univ Catalonia, Dept Elect Engn, Barcelona, Spain
关键词
D O I
10.1109/ISCAS.2007.378077
中图分类号
TP18 [人工智能理论];
学科分类号
081104 ; 0812 ; 0835 ; 1405 ;
摘要
A new 'reverse mode' for Pulsed Digital Oscillators is proposed that cancels out unwanted vibrations in high-Q MEMS resonators. For a given resonator, PDOs may present two opposed behaviours, depending on the sign of the feedback signal and the sampling frequency: a) the feedback signal may force oscillations, or b) it can cancel out the oscillations reaching a limit orbit near the origin. This second behaviour can actually be used to cancel out unwanted vibrations. Theory and simulations results are presented. The case study considered is one in which the resonator has been hit and therefore it has suddenly increased its velocity.
引用
收藏
页码:925 / 928
页数:4
相关论文
共 50 条
  • [1] High-Q GaN nanowire resonators and oscillators
    Tanner, S. M.
    Gray, J. M.
    Rogers, C. T.
    Bertness, K. A.
    Sanford, N. A.
    [J]. APPLIED PHYSICS LETTERS, 2007, 91 (20)
  • [2] Laser annealing for high-Q MEMS resonators
    Aubin, KL
    Zalalutdinov, M
    Reichenbach, RB
    Houston, B
    Zehnder, AT
    Parpia, JM
    Craighead, HG
    [J]. SMART SENSORS, ACTUATORS, AND MEMS, PTS 1 AND 2, 2003, 5116 : 531 - 535
  • [3] A mechanically coupled MEMS filter with high-Q width extensional mode resonators
    Wei Wang
    Wenli Liu
    Junyuan Zhao
    Bo Niu
    Zeyu Wu
    Yinfang Zhu
    Jinling Yang
    Fuhua Yang
    [J]. JournalofSemiconductors, 2024, 45 (08) : 50 - 58
  • [4] A mechanically coupled MEMS filter with high-Q width extensional mode resonators
    Wang, Wei
    Liu, Wenli
    Zhao, Junyuan
    Niu, Bo
    Wu, Zeyu
    Zhu, Yinfang
    Yang, Jinling
    Yang, Fuhua
    [J]. JOURNAL OF SEMICONDUCTORS, 2024, 45 (08)
  • [5] High-Q Support Transducer MEMS Resonators Enabled Low-Phase-Noise Oscillators
    Jen, Hsin-Tung
    Pillai, Gayathri
    Liu, Shen-Iuan
    Li, Sheng-Shian
    [J]. IEEE TRANSACTIONS ON ULTRASONICS FERROELECTRICS AND FREQUENCY CONTROL, 2021, 68 (04) : 1387 - 1398
  • [6] Cryogenic high-Q microwave resonators for stable oscillators
    Vitusevich, S
    Winter, M
    Klein, N
    [J]. IEEE TRANSACTIONS ON APPLIED SUPERCONDUCTIVITY, 2001, 11 (01) : 1195 - 1198
  • [7] High-Q MEMS Resonators for Laser Beam Scanning Displays
    Hofmann, Ulrich
    Janes, Joachim
    Quenzer, Hans-Joachim
    [J]. MICROMACHINES, 2012, 3 (02) : 509 - 528
  • [8] High-Q optical resonators: characterization and application to stabilization of lasers and high spectral purity microwave oscillators
    Llopis, O.
    Merrer, P. H.
    Bouchier, A.
    Saleh, K.
    Cibiel, G.
    [J]. LASER RESONATORS AND BEAM CONTROL XII, 2010, 7579
  • [9] High-Q BBO whispering gallery mode resonators
    Lin, Guoping
    Fuerst, Josef U.
    Strekalov, Dmitry V.
    Grudinin, Ivan S.
    Yu, Nan
    [J]. LASER RESONATORS, MICRORESONATORS, AND BEAM CONTROL XV, 2013, 8600
  • [10] High-Q Optical Resonators for Stabilization of High Spectral Purity Microwave Oscillators
    Merrer, P. -H.
    Bouchier, A.
    Brahimi, H.
    Llopis, O.
    Cibiel, G.
    [J]. 2009 JOINT MEETING OF THE EUROPEAN FREQUENCY AND TIME FORUM AND THE IEEE INTERNATIONAL FREQUENCY CONTROL SYMPOSIUM, VOLS 1 AND 2, 2009, : 866 - +