A Microfluidic Mixer of High Throughput Fabricated in Glass Using Femtosecond Laser Micromachining Combined with Glass Bonding

被引：18

作者：

Qi, Jia ^{[1
,2
]}

Li, Wenbo ^{[1
,2
,3
]}

Chu, Wei ^{[4
]}

Yu, Jianping ^{[1
,2
,5
]}

Wu, Miao ^{[4
]}

Liang, Youting ^{[4
]}

Yin, Difeng ^{[1
,2
]}

Wang, Peng ^{[1
,2
,5
]}

Wang, Zhenhua ^{[4
]}

Wang, Min ^{[4
]}

Cheng, Ya ^{[1
,4
,6
,7
]}

机构：

[1] Chinese Acad Sci, Shanghai Inst Opt & Fine Mech, State Key Lab High Field Laser Phys, Shanghai 201800, Peoples R China

[2] Univ Chinese Acad Sci, Beijing 100049, Peoples R China

[3] ShanghaiTech Univ, Sch Phys Sci & Technol, Shanghai 200031, Peoples R China

[4] East China Normal Univ, Sch Phys & Elect Sci, XXL Extreme Optoelectromech Lab, Shanghai 200241, Peoples R China

[5] Tongji Univ, Sch Phys Sci & Engn, Shanghai 200092, Peoples R China

[6] East China Normal Univ, State Key Lab Precis Spect, Shanghai 200062, Peoples R China

[7] Shandong Normal Univ, Collaborat Innovat Ctr Light Manipulat & Applicat, Jinan 250358, Peoples R China

来源：

MICROMACHINES | 2020年 / 11卷 / 02期

关键词：

ultrafast laser microfabrication; microfluidic; glass bonding; MICROMIXERS; PERFORMANCE;

D O I：

10.3390/mi11020213

中图分类号：

O65 [分析化学];

学科分类号：

070302 ; 081704 ;

摘要：

We demonstrate a microfluidic mixer of high mixing efficiency in fused silica substrate using femtosecond laser-induced wet etching and hydroxide-catalysis bonding method. The micromixer has a three-dimensional geometry, enabling efficient mixing based on Baker's transformation principle. The cross-sectional area of the fabricated micromixer was 0.5 x 0.5 mm(2), enabling significantly promotion of the throughput of the micromixer. The performance of the fabricated micromixers was evaluated by mixing up blue and yellow ink solutions with a flow rate as high as 6 mL/min.

引用

页数：8

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