On the Origin of Cavities in PZT Thin Film and their Influence on Capacitors Reliability

被引：0
|
作者：
Chentir, M. T. [1 ]
Ventura, L. [1 ]
Bouyssou, E. [2 ]
Anceau, C. [2 ]
机构：
[1] Univ Tours, Lab Microelect Puissance, F-37041 Tours, France
[2] St Microelect, F-37071 Tours 2, France
来源：
INTEGRATED FERROELECTRICS | 2009年 / 112卷
关键词：
PIEZOELECTRIC PROPERTIES;
D O I：
10.1080/10584587.2009.484703
中图分类号：
TM [电工技术]; TN [电子技术、通信技术];
学科分类号：
0808 ; 0809 ;
摘要：
This paper deals with the origin of voids defects in PZT microstructure, appearing after top electrode post-deposition heat treatment. The process conditions of voids apparition are especially investigated, as well as the consequences of these defects on capacitors electrical properties.
引用
收藏
页码：88 / 94
页数：7
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