Influence of surface treatment on the structure and properties of proton-exchanged waveguides in lithium niobate

被引：0
|
作者：
Mushinsky, Sergey S. [1 ]
Petukhov, Igor V. [1 ]
Kichigin, Vladimir I. [1 ]
Semenova, Oksana R. [1 ]
Volyntsev, Anatoliy B. [1 ]
机构：
[1] Perm State Univ, Perm Res & Prod Instrument Making Co, Perm, Russia
来源：
FERROELECTRICS | 2020年 / 560卷 / 01期
关键词：
Reverse proton exchange; waveguide; lithium niobate; surface treatment; LINBO3; INDEX;
D O I：
10.1080/00150193.2020.1722877
中图分类号：
T [工业技术];
学科分类号：
08 ;
摘要：
The influence of reverse proton exchange (RPE) and some types of surface pretreatment (exposure to Piranha or RCA-1 solutions or to HNO3+HF mixture) on the structure and properties of proton-exchanged layers has been studied in X-cut lithium niobate (LN). It has been shown that the rate of phase transitions in PE layers during RPE is greater than that during annealing at the same temperature. Pretreatment of LN surface before PE by Piranha or RCA-1 solutions slightly increases refractive index change Delta n(e) in the resulting waveguide, whereas pretreatment by HNO3+HF mixture decreases it.
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收藏
页码：13 / 20
页数：8
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