Wire-grid polarizer for the UV spectral region

In this work we present a metal wire grid polarizer for the UV spectral region. The period of the aluminum grating is 100 nm. The grating was fabricated using a spatial frequency doubling technique. The process consist of electron-beam-lithography, sputter coating and various ion-beam-and ICP etching steps. The features of the fabricated aluminum wires fulfill the theoretical demands with a height of 150 nm and a width of 35 nm. Optical parameters of the grating at 250 nm wavelength are 42% transmittance and an extinction ratio of almost 15. The optical parameters are even improved with the wavelength.