Special section on the international symposium on semiconductor manufacturing

被引：0

作者：

Otsuka, Nobuhiro ^{[1
]}

Uchino, Toshiyuki ^{[1
]}

机构：

[1] Renesas Technol Corp, Strateg Prod Planning Div, Prod & Technol Unit, Tokyo 100, Japan

来源：

IEEE TRANSACTIONS ON SEMICONDUCTOR MANUFACTURING | 2007年 / 20卷 / 03期

关键词：

D O I：

10.1109/TSM.2007.901954

中图分类号：

T [工业技术];

学科分类号：

08 ;

摘要：

引用

页码：193 / 194

页数：2

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