Near-field fluorescence imaging with 32 nm resolution based on microfabricated cantilevered probes

High-resolution near-field optical imaging with microfabricated probes is demonstrated. The probes are made from solid quartz tips fabricated at the end of silicon cantilevers and covered with a 60-nm-thick aluminum film. Transmission electron micrographs indicate a continuous aluminum layer at the tip apex. A specially designed instrument combines the advantages of near-field optical and beam-deflection force microscopy. Near-field optical data of latex bead projection patterns in transmission and of single fluorophores have been obtained in constant-height imaging mode. An artifact-free optical resolution of 31.7 +/-3.6 nm has been deduced from full width at half maximum values of single molecule images. (C) 2000 American Institute of Physics. [S0003-6951(00)05449-8].