H2 selective gas sensor based on SnO2

被引:0
|
作者
Katsuki, A [1 ]
Fukui, K [1 ]
机构
[1] New Cosmos Elect Co Ltd, Yodogawa Ku, Osaka 5320036, Japan
关键词
D O I
暂无
中图分类号
O69 [应用化学];
学科分类号
081704 ;
摘要
A highly selective H-2 gas sensor was obtained by formation of a dense layer functioning as a "molecular sieve" near the surface of a sintered tin oxide layer. The dense layer (the depth of ca. 0.1 mm) was formed by chemical vapor deposition of hexamethyldisiloxane (HMDS). While, a serious reduction of the hydrogen sensitivity was always caused by a deactivation of tin oxide with hydrogen. Such a serious problem was removed by an addition of cerium oxide (2.0 at%), thereby the oxidation activity of tin oxide was controlled. The H-2 selective gas sensor thus obtained had an extremely minor humidity dependence and a prominent long term stability.
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页码:371 / 373
页数:3
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