Investigation of Trapping and Hot-Electron Effects in GaN HEMTs by Means of a Combined Electrooptical Method

被引:137
|
作者
Meneghini, Matteo [1 ]
Ronchi, Nicolo [1 ]
Stocco, Antonio [1 ]
Meneghesso, Gaudenzio [1 ]
Mishra, Umesh K. [2 ]
Pei, Yi [3 ]
Zanoni, Enrico [1 ]
机构
[1] Univ Padua, Dept Informat Engn, I-35131 Padua, Italy
[2] Univ Calif Santa Barbara, Dept Elect & Comp Engn, Santa Barbara, CA 93106 USA
[3] Dynax Semicond Inc, Xian 170075, Shaanxi, Peoples R China
关键词
Characterization; gallium nitride; high-electron mobility transistors (HEMT); luminescence; traps; ALGAN/GAN HEMTS; ELECTROLUMINESCENCE; RELIABILITY; SILICON; IMPACT; TRAPS; DC;
D O I
10.1109/TED.2011.2160547
中图分类号
TM [电工技术]; TN [电子技术、通信技术];
学科分类号
0808 ; 0809 ;
摘要
This paper presents a fast methodology for the investigation of trapping and hot-electron effects in GaN-based high-electron mobility transistors (HEMTs). The presented method is based on pulsed I-D-V-G measurements and electroluminescence characterization and provides a rapid and effective evaluation of the following: 1) the presence of traps in the region under the gate; 2) trapping phenomena occurring in the gate-drain access region; 3) the role of traps in limiting the maximum gate-drain electric field and the equivalent electron temperature. The method is validated by means of a split-wafer experiment carried out on GaN-based HEMTs with different gate materials with and without passivation.
引用
收藏
页码:2996 / 3003
页数:8
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