Low temperature growth of carbon nanotube by thermal CVD with FeZrN catalyst

被引：0
|
作者：
Shiroishi, T [1 ]
Sawada, T [1 ]
Hosono, A [1 ]
Nakata, S [1 ]
机构：
[1] Mitsubishi Electr Corp, Adv R&D Ctr, Amagasaki, Hyogo, Japan
来源：
TECHNICAL DIGEST OF THE 16TH INTERNATIONAL VACUUM MICROELECTRONICS CONFERENCE | 2003年
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D O I：
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中图分类号：
O69 [应用化学];
学科分类号：
081704 ;
摘要：
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页码：13 / 14
页数：2
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