Design of a Feedforward Controller for AFM Nanopositioning Based on Neural Network Control Theory

被引：0

作者：

Payam, Amir Farrokh ^{[1
]}

Yazdanpanah, Mohammad Javad ^{[2
]}

Fathipour, Morteza ^{[1
]}

机构：

[1] Univ Tehran, Sch Elect & Comp Engn, Device Modelling & Simulat Lab, Tehran, Iran

[2] Univ Tehran, Sch Elect & Comp Engn, Tehran, Iran

来源：

2009 4TH IEEE INTERNATIONAL CONFERENCE ON NANO/MICRO ENGINEERED AND MOLECULAR SYSTEMS, VOLS 1 AND 2 | 2009年

关键词：

Atomic Force Microscope; Piezoelectric Actuator; Nanopositioning; AFM control; INVERSE-FEEDFORWARD;

D O I：

暂无

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

This paper presents design procedure for a neural feedforward controller which can be used as an atomic force microscope system. We have used a three layered feed forward neural network for designing Feedforward Controller with Plant Inverse Learning. The effectiveness and validity of the designed controller were investigated by computer simulation and results obtained are compared with other control methods, and show superior performance. Advantages of using proposed controller include increased bandwidth of operation and easy implementation in nanopositioning for the AFM.

引用

页码：717 / +

页数：3

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