Fabrication of micro-optic elements by the sol-gel method

被引：11

作者：

Shinmou, K ^{[1
]}

Nakama, K ^{[1
]}

Koyama, T ^{[1
]}

机构：

[1] Nippon Sheet Glass Co Ltd, Tsukuba, Ibaraki 3002635, Japan

来源：

JOURNAL OF SOL-GEL SCIENCE AND TECHNOLOGY | 2000年 / 19卷 / 1-3期

关键词：

micro-optics; micro-lens; organic-inorganic material; thick film;

D O I：

10.1023/A:1008756826711

中图分类号：

TQ174 [陶瓷工业]; TB3 [工程材料学];

学科分类号：

0805 ; 080502 ;

摘要：

Micro-lens arrays composed of organic-inorganic materials were molded on glass substrates by the sol-gel method. Each lens had the same focal length and accurate pitch. There was no change in appearance or focal length after heat treatment at 350 degreesC. The arrays had a refractive index of 1.53 (@1550 nm) and a transmittance of 98%/mm (@1550 nm). The film material did not change in appearance during evaluation for acid resistance.

引用

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页码：267 / 269

页数：3

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