Photonic integrated alumina waveguide gratings for far-field structured illumination at UV wavelengths

被引：0
|
作者：
Lin, Chupao [1 ,4 ]
Penaranda, Juan Santo Domingo [2 ]
Dendooven, Jolien [2 ]
Detavernier, Christophe [2 ]
Schaubroeck, David [3 ]
Baets, Roel [1 ,4 ]
Le Thomas, Nicolas [1 ,4 ]
机构：
[1] Univ Ghent, imec, Photon Res Grp, Ghent, Belgium
[2] Univ Ghent, Cocoon Dept Solid Stae Sci, Ghent, Belgium
[3] Univ Ghent, Ctr Microsyst Technol CMST, imec, Ghent, Belgium
[4] Univ Ghent, Ctr Nano & Biophoton, NB Photon, Ghent, Belgium
来源：
2021 CONFERENCE ON LASERS AND ELECTRO-OPTICS (CLEO) | 2021年
关键词：
D O I：
暂无
中图分类号：
TM [电工技术]; TN [电子技术、通信技术];
学科分类号：
0808 ; 0809 ;
摘要：
We demonstrate far-field UV structured illumination implemented with integrated aluminum oxide (AlOx) waveguide gratings. Based on simulation and experimental results, we discuss the performances of two AlOx waveguide gratings operating at lambda= 360nm. (c) 2021TheAuthor(s)
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页数：2
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